The cryogenic wafer system installed at University College London allows manipulation of wafers between a Cartesian Spotter, Furnace and a Cryogenic chamber. Labman produced the system which incorporates the XYZ gantry for wafer manipulation and also the Cartesian spotter. There is room for the later addition of the furnace and cryogenic bath. The system is controlled from a simple windows GUI which allows access to all of the system modules.
Main Features
Large amount of bed space for future additions
A handling system to manipulate wafers from the bed to the oven