Key features
Large Bed SpaceLarge amount of bed space for future additions
Handling SystemHandling system to manipulate delicate wafers
Spotting EquipmentIntegration of third party spotting equipment
Graphical User InterfaceSimple to use Graphical User Interface
Incubation Oven LoadingIncubation oven loading
Customer Software IntegrationIntegration with customer software
Overview
System Overview.
The cryogenic wafer system installed at University College London allows manipulation of wafers between a Cartesian Spotter, furnace and a cryogenic chamber. Labman produced the system which incorporates the XYZ gantry for wafer manipulation and also the Cartesian spotter. There is room for the later addition of the furnace and cryogenic bath. The system is controlled from a simple windows GUI which allows access to all of the system modules.